Current-Voltage Characteristics of DC Discharge in Micro Gas Jet Injected into Vacuum Environment
نویسندگان
چکیده
منابع مشابه
Current-Voltage Characteristics of DC Discharge in Micro Gas Jet Injected into Vacuum Environment
A current-voltage characteristic of direct current (DC) gas discharge operated in a micro gas jet injected into a secondary electron microscope (SEM) chamber is presented. Ar gas was injected through a 30 μm orifice gas nozzle (OGN) and was evacuated by an additional pump to keep the high vacuum environment. Gas discharges were ignited between the OGN as anode and a counter electrode of Si wafe...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2013
ISSN: 1742-6596
DOI: 10.1088/1742-6596/441/1/012021